Microstructure measurement of digital holography

• Main Authors: Li, Jicheng, Tian, Ailing, Wang, Hongjun, Zhu, Xueliang, Wang, Chunhui, Liu, Bingcai, Asundi, Anand
• Format: Conference or Workshop Item
• Language: English
• Published: 2018
• Subjects: DRNTU::Engineering::Mechanical engineering; Recording Light Path; Micro-structure Measurement
• Online Access: https://hdl.handle.net/10356/88785; http://hdl.handle.net/10220/46971
• Institution: Nanyang Technological University

Miniaturization is a development trend of electronics, machinery and information systems, while micro structure brought a large amount of new development for industrial and research applications, whereas, slow measuring speed and two-dimensional results of traditional micro measurement could not mee...