Microstructure measurement of digital holography
Miniaturization is a development trend of electronics, machinery and information systems, while micro structure brought a large amount of new development for industrial and research applications, whereas, slow measuring speed and two-dimensional results of traditional micro measurement could not mee...
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| Main Authors: | , , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/88785 http://hdl.handle.net/10220/46971 |
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| Institution: | Nanyang Technological University |
| Language: | English |