Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
This paper describes the application of lensless in-line digital holographic microscopy (DHM) to carry out thermo-mechanical characterization of microheaters fabricated through PolyMUMPs three-layer polysilicon surface micromachining process and subjected to a high thermal load. The mechanical defor...
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Main Authors: | , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2011
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/94023 http://hdl.handle.net/10220/6968 |
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Institution: | Nanyang Technological University |
Language: | English |