Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography

This paper describes the application of lensless in-line digital holographic microscopy (DHM) to carry out thermo-mechanical characterization of microheaters fabricated through PolyMUMPs three-layer polysilicon surface micromachining process and subjected to a high thermal load. The mechanical defor...

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Bibliographic Details
Main Authors: Jayaraman, Balaji, Singh, Vijay Raj, Anand, Asundi, Bhat, Navakanta, Hegde, Gopalkrishna M.
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/10356/94023
http://hdl.handle.net/10220/6968
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Institution: Nanyang Technological University
Language: English
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