Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography

This paper describes the application of lensless in-line digital holographic microscopy (DHM) to carry out thermo-mechanical characterization of microheaters fabricated through PolyMUMPs three-layer polysilicon surface micromachining process and subjected to a high thermal load. The mechanical defor...

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Main Authors: Jayaraman, Balaji, Singh, Vijay Raj, Anand, Asundi, Bhat, Navakanta, Hegde, Gopalkrishna M.
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2011
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Online Access:https://hdl.handle.net/10356/94023
http://hdl.handle.net/10220/6968
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-940232023-03-04T17:17:59Z Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography Jayaraman, Balaji Singh, Vijay Raj Anand, Asundi Bhat, Navakanta Hegde, Gopalkrishna M. School of Mechanical and Aerospace Engineering DRNTU::Science::Physics::Optics and light This paper describes the application of lensless in-line digital holographic microscopy (DHM) to carry out thermo-mechanical characterization of microheaters fabricated through PolyMUMPs three-layer polysilicon surface micromachining process and subjected to a high thermal load. The mechanical deformation of the microheaters on the electrothermal excitation due to thermal stress is analyzed. The numerically reconstructed holographic images of the microheaters clearly indicate the regions under high stress. A double-exposure method has been used to obtain the quantitative measurements of the deformations, from the phase analysis of the hologram fringes. The measured deformations correlate well with the theoretical values predicted by a thermo-mechanical analytical model. The results show that lensless in-line DHM with Fourier analysis is an effective method for evaluating the thermo-mechanical characteristics of MEMS components. Accepted version 2011-09-02T08:37:04Z 2019-12-06T18:49:25Z 2011-09-02T08:37:04Z 2019-12-06T18:49:25Z 2010 2010 Journal Article Jayaraman, B., Singh, V. R., Anand, A., Bhat, N., & Hegde, G. M. (2010). Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography. Measurement Science and Technology, 21(1). 0957-0233 https://hdl.handle.net/10356/94023 http://hdl.handle.net/10220/6968 10.1088/0957-0233/21/1/015301 148393 en Measurement science and technology © 2010 IOP Publishing Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Measurement Science and Technology, IOP Publishing Ltd.  It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document.  The published version is available at: [DOI: http://dx.doi.org/10.1088/0957-0233/21/1/015301]. 11 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Science::Physics::Optics and light
spellingShingle DRNTU::Science::Physics::Optics and light
Jayaraman, Balaji
Singh, Vijay Raj
Anand, Asundi
Bhat, Navakanta
Hegde, Gopalkrishna M.
Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
description This paper describes the application of lensless in-line digital holographic microscopy (DHM) to carry out thermo-mechanical characterization of microheaters fabricated through PolyMUMPs three-layer polysilicon surface micromachining process and subjected to a high thermal load. The mechanical deformation of the microheaters on the electrothermal excitation due to thermal stress is analyzed. The numerically reconstructed holographic images of the microheaters clearly indicate the regions under high stress. A double-exposure method has been used to obtain the quantitative measurements of the deformations, from the phase analysis of the hologram fringes. The measured deformations correlate well with the theoretical values predicted by a thermo-mechanical analytical model. The results show that lensless in-line DHM with Fourier analysis is an effective method for evaluating the thermo-mechanical characteristics of MEMS components.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Jayaraman, Balaji
Singh, Vijay Raj
Anand, Asundi
Bhat, Navakanta
Hegde, Gopalkrishna M.
format Article
author Jayaraman, Balaji
Singh, Vijay Raj
Anand, Asundi
Bhat, Navakanta
Hegde, Gopalkrishna M.
author_sort Jayaraman, Balaji
title Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
title_short Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
title_full Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
title_fullStr Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
title_full_unstemmed Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
title_sort thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
publishDate 2011
url https://hdl.handle.net/10356/94023
http://hdl.handle.net/10220/6968
_version_ 1759853533535928320