Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography

• Main Authors: Jayaraman, Balaji, Singh, Vijay Raj, Anand, Asundi, Bhat, Navakanta, Hegde, Gopalkrishna M.
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2011
• Subjects: DRNTU::Science::Physics::Optics and light
• Online Access: https://hdl.handle.net/10356/94023; http://hdl.handle.net/10220/6968
• Institution: Nanyang Technological University

This paper describes the application of lensless in-line digital holographic microscopy (DHM) to carry out thermo-mechanical characterization of microheaters fabricated through PolyMUMPs three-layer polysilicon surface micromachining process and subjected to a high thermal load. The mechanical defor...