Remote plasma-assisted low-temperature large-area graphene synthesis
Graphene is typically grown using thermal chemical vapor deposition (CVD) on metallic substrates such as copper and nickel at elevated temperatures above 1000 °C. The synthesis of large-area graphene at low temperature is highly desirable for large volume industrial production. In this paper, the au...
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sg-ntu-dr.10356-900392023-03-04T17:17:22Z Remote plasma-assisted low-temperature large-area graphene synthesis Pae, Jian Yi Medwal, Rohit Vas, Joseph Vimal Matham, Murukeshan Vadakke Rawat, Rajdeep Singh School of Mechanical and Aerospace Engineering Centre for Optical and Laser Engineering Singapore Centre for 3D Printing Graphene Engineering::Mechanical engineering Plasma Processing Graphene is typically grown using thermal chemical vapor deposition (CVD) on metallic substrates such as copper and nickel at elevated temperatures above 1000 °C. The synthesis of large-area graphene at low temperature is highly desirable for large volume industrial production. In this paper, the authors report a remote plasma-assisted CVD graphene synthesis at a reduced temperature of 600 °C in a relatively shorter duration of 15 min. Scanning electron microscopy reveals the formation of large graphene crystal with an approximate size of 100 × 100 μm2 over the entire 2 × 10 cm2 surface of copper foil substrates. Raman spectra recorded for graphene grown at 600 °C show the presence of a graphene characteristic “2D” peak, attesting to the formation of graphene. The results show that it is possible to grow horizontal graphene at low temperatures and transfer it to flexible polyethylene terephthalate substrates. The utility of the synthesized graphene is ascertained through the successful fabrication of a flexible graphene-based electrochemical sensor for the detection of glucose concentration. The present research will have a direct impact on flexible wearable biosensors. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) Published version 2019-07-16T03:03:47Z 2019-12-06T17:39:18Z 2019-07-16T03:03:47Z 2019-12-06T17:39:18Z 2019 Journal Article Pae, J. Y., Medwal, R., Vas, J. V., Matham, M. V., & Rawat, R. S. (2019). Remote plasma-assisted low-temperature large-area graphene synthesis. Journal of Vacuum Science & Technology B, 37(4), 041201-. doi:10.1116/1.5093241 2166-2746 https://hdl.handle.net/10356/90039 http://hdl.handle.net/10220/49355 10.1116/1.5093241 en Journal of Vacuum Science and Technology B © 2019 American Vacuum Society. All rights reserved. This paper was published in Journal of Vacuum Science and Technology B and is made available with permission of American Vacuum Society. 6 p. application/pdf |
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Graphene Engineering::Mechanical engineering Plasma Processing Pae, Jian Yi Medwal, Rohit Vas, Joseph Vimal Matham, Murukeshan Vadakke Rawat, Rajdeep Singh Remote plasma-assisted low-temperature large-area graphene synthesis |
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Graphene is typically grown using thermal chemical vapor deposition (CVD) on metallic substrates such as copper and nickel at elevated temperatures above 1000 °C. The synthesis of large-area graphene at low temperature is highly desirable for large volume industrial production. In this paper, the authors report a remote plasma-assisted CVD graphene synthesis at a reduced temperature of 600 °C in a relatively shorter duration of 15 min. Scanning electron microscopy reveals the formation of large graphene crystal with an approximate size of 100 × 100 μm2 over the entire 2 × 10 cm2 surface of copper foil substrates. Raman spectra recorded for graphene grown at 600 °C show the presence of a graphene characteristic “2D” peak, attesting to the formation of graphene. The results show that it is possible to grow horizontal graphene at low temperatures and transfer it to flexible polyethylene terephthalate substrates. The utility of the synthesized graphene is ascertained through the successful fabrication of a flexible graphene-based electrochemical sensor for the detection of glucose concentration. The present research will have a direct impact on flexible wearable biosensors. |
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School of Mechanical and Aerospace Engineering |
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School of Mechanical and Aerospace Engineering Pae, Jian Yi Medwal, Rohit Vas, Joseph Vimal Matham, Murukeshan Vadakke Rawat, Rajdeep Singh |
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Article |
author |
Pae, Jian Yi Medwal, Rohit Vas, Joseph Vimal Matham, Murukeshan Vadakke Rawat, Rajdeep Singh |
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Pae, Jian Yi |
title |
Remote plasma-assisted low-temperature large-area graphene synthesis |
title_short |
Remote plasma-assisted low-temperature large-area graphene synthesis |
title_full |
Remote plasma-assisted low-temperature large-area graphene synthesis |
title_fullStr |
Remote plasma-assisted low-temperature large-area graphene synthesis |
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Remote plasma-assisted low-temperature large-area graphene synthesis |
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remote plasma-assisted low-temperature large-area graphene synthesis |
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2019 |
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https://hdl.handle.net/10356/90039 http://hdl.handle.net/10220/49355 |
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1759853551206531072 |