Remote plasma-assisted low-temperature large-area graphene synthesis

• Main Authors: Pae, Jian Yi, Medwal, Rohit, Vas, Joseph Vimal, Matham, Murukeshan Vadakke, Rawat, Rajdeep Singh
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2019
• Subjects: Graphene; Engineering::Mechanical engineering; Plasma Processing
• Online Access: https://hdl.handle.net/10356/90039; http://hdl.handle.net/10220/49355
• Institution: Nanyang Technological University

Graphene is typically grown using thermal chemical vapor deposition (CVD) on metallic substrates such as copper and nickel at elevated temperatures above 1000 °C. The synthesis of large-area graphene at low temperature is highly desirable for large volume industrial production. In this paper, the au...