Profile of optical constants of SiO2 thin films containing Si nanocrystals

• Main Authors: Dong, Gui, Chen, Tupei, Liu, Yang, Tse, Man Siu, Fung, Stevenson Hon Yuen
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: https://hdl.handle.net/10356/90789; http://hdl.handle.net/10220/6412
• Institution: Nanyang Technological University

For optoelectronic and photonic applications of Si nanocrystals (nc-Si) embedded in a SiO2 matrix, the information of the depth profiles of the optical constants for the thin film system is necessary. In this work, an approach of the depth profiling for the thin film synthesized with ion implantatio...