Dielectric functions of densely stacked Si nanocrystal layer embedded in SiO2 thin films

• Main Authors: Ding, Liang, Chen, Tupei, Wong, Jen It, Yang, Ming, Liu, Yang, Ng, Chi Yung, Liu, Yu Chan, Tung, Chih Hang, Trigg, Alastair David, Fung, Stevenson Hon Yuen
• Other Authors: A*STAR SIMTech
• Format: Article
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: https://hdl.handle.net/10356/91065; http://hdl.handle.net/10220/6401
• Institution: Nanyang Technological University

A densely stacked silicon nanocrystal layer embedded in a SiO2 thin film is synthesized with Si ion implantation. The dielectric functions of the nanocrystal layer are determined with spectroscopic ellipsometry. The dielectric functions show a significant suppression as compared to that of bulk crys...