Theory of the single contact electron beam induced current effect

All publications on the single contact electron beam induced current (SC-EBIC) technique so far have been concerned with the application of the technique. This paper seeks to examine the theory behind the technique and supports it with experimental observation. It will be shown that the technique ca...

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Main Authors:	Lau, K. T., Ong, Vincent K. S., Ma, Jianguo
Other Authors:	School of Electrical and Electronic Engineering
Format:	Article
Language:	English
Published:	2009
Subjects:	DRNTU::Engineering::Electrical and electronic engineering
Online Access:	https://hdl.handle.net/10356/91293 http://hdl.handle.net/10220/4714
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-91293
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spelling	sg-ntu-dr.10356-912932020-03-07T14:02:38Z Theory of the single contact electron beam induced current effect Lau, K. T. Ong, Vincent K. S. Ma, Jianguo School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering All publications on the single contact electron beam induced current (SC-EBIC) technique so far have been concerned with the application of the technique. This paper seeks to examine the theory behind the technique and supports it with experimental observation. It will be shown that the technique can be used, not only on electron and ion beam machines, but also on any scanning equipment that is capable of generating electron-hole pairs. Published version 2009-07-28T07:28:46Z 2019-12-06T18:03:03Z 2009-07-28T07:28:46Z 2019-12-06T18:03:03Z 2000 2000 Journal Article Ong, V. K. S., Lau, K. T., & Ma, J. G. (2000). Theory of the single contact electron beam induced current effect. IEEE Transactions nn Electron Devices, 47(4), 897-899. 0018-9383 https://hdl.handle.net/10356/91293 http://hdl.handle.net/10220/4714 10.1109/16.831013 en IEEE transactions and electron devices © 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. 3 p. application/pdf
institution	Nanyang Technological University
building	NTU Library
country	Singapore
collection	DR-NTU
language	English
topic	DRNTU::Engineering::Electrical and electronic engineering
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering Lau, K. T. Ong, Vincent K. S. Ma, Jianguo Theory of the single contact electron beam induced current effect
description	All publications on the single contact electron beam induced current (SC-EBIC) technique so far have been concerned with the application of the technique. This paper seeks to examine the theory behind the technique and supports it with experimental observation. It will be shown that the technique can be used, not only on electron and ion beam machines, but also on any scanning equipment that is capable of generating electron-hole pairs.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Lau, K. T. Ong, Vincent K. S. Ma, Jianguo
format	Article
author	Lau, K. T. Ong, Vincent K. S. Ma, Jianguo
author_sort	Lau, K. T.
title	Theory of the single contact electron beam induced current effect
title_short	Theory of the single contact electron beam induced current effect
title_full	Theory of the single contact electron beam induced current effect
title_fullStr	Theory of the single contact electron beam induced current effect
title_full_unstemmed	Theory of the single contact electron beam induced current effect
title_sort	theory of the single contact electron beam induced current effect
publishDate	2009
url	https://hdl.handle.net/10356/91293 http://hdl.handle.net/10220/4714
_version_	1681033951143002112

Theory of the single contact electron beam induced current effect

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