Theory of the single contact electron beam induced current effect

• Main Authors: Lau, K. T., Ong, Vincent K. S., Ma, Jianguo
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/91293; http://hdl.handle.net/10220/4714
• Institution: Nanyang Technological University

All publications on the single contact electron beam induced current (SC-EBIC) technique so far have been concerned with the application of the technique. This paper seeks to examine the theory behind the technique and supports it with experimental observation. It will be shown that the technique ca...