Theory of the single contact electron beam induced current effect
All publications on the single contact electron beam induced current (SC-EBIC) technique so far have been concerned with the application of the technique. This paper seeks to examine the theory behind the technique and supports it with experimental observation. It will be shown that the technique ca...
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Main Authors: | Lau, K. T., Ong, Vincent K. S., Ma, Jianguo |
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Other Authors: | School of Electrical and Electronic Engineering |
Format: | Article |
Language: | English |
Published: |
2009
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/91293 http://hdl.handle.net/10220/4714 |
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Institution: | Nanyang Technological University |
Language: | English |
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