Theory of the single contact electron beam induced current effect

• Main Authors: Lau, K. T., Ong, Vincent K. S., Ma, Jianguo
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2009
• 主題: DRNTU::Engineering::Electrical and electronic engineering
• 在線閱讀: https://hdl.handle.net/10356/91293; http://hdl.handle.net/10220/4714

All publications on the single contact electron beam induced current (SC-EBIC) technique so far have been concerned with the application of the technique. This paper seeks to examine the theory behind the technique and supports it with experimental observation. It will be shown that the technique ca...