100-GHz quasi-yagi antenna in silicon technology

• Main Authors: Sun, Mei, Zhang, Yue Ping
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2009
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
• 在線閱讀: https://hdl.handle.net/10356/91333; http://hdl.handle.net/10220/4568; http://sfxna09.hosted.exlibrisgroup.com:3410/ntu/sfxlcl3?sid=metalib:EVII&id=doi:10.1109/LED.2007.895447&genre=&isbn=&issn=07413106&date=2007&volume=28&issue=5&spage=455&epage=457&aulast=Sun&aufirst=%20Mei&auinit=&title=IEEE%20Electron%20Device%20Letters&atitle=100%2DGHz%20Quasi%2DYagi%20antenna%20in%20silicon%20technology

This letter presents a 100-GHz integrated Quasi-Yagi antenna on silicon substrates of low resistivity 10 Omegamiddotcm. The fabrication was realized with the back-end-of-line process. The characterization was conducted on wafer with Cascade Microtech coplanar probes and an HP8510XF network analyzer....