Characterization of MEMS cantilevers using lensless digital holographic microscope

• Main Authors: Andrei, Alexandru, Gorecki, Cristophe, Nieradko, Lukasz, Singh, Vijay Raj, Anand, Asundi
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: https://hdl.handle.net/10356/94145; http://hdl.handle.net/10220/7239
• Institution: Nanyang Technological University

In this paper vibration characterization of MEMS cantilevers are presented using lens-less in-line digital holographic microscope (LDHM). In-line digital holography provides larger information capability with higher phase sensitivity, and full CCD sensor area is utilized for real image reconstructio...