Scratch resistance of brittle thin films on compliant substrates

• Main Authors: Wu, Linda Y. L., Chen, Zhong, Chwa, Edmund, Tham, Otto
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/94151; http://hdl.handle.net/10220/8173
• Institution: Nanyang Technological University

There has been intensive interest in studying the behavior of hard and brittle thin films on compliant substrates under scratch action. The examples include sol–gel protective coatings on plastic optical lenses, safe windows, and flexible electronic devices and displays. Hard ceramic coatings have b...