Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography

• Main Authors: Miao, Jianmin, Singh, Vijay Raj, Wang, Zhihong, Hegde, Gopalkrishna M., Anand, Asundi
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2011
• Subjects: DRNTU::Science::Physics::Optics and light
• Online Access: https://hdl.handle.net/10356/94157; http://hdl.handle.net/10220/7003
• Institution: Nanyang Technological University

In this paper dynamic characterization of a MEMS diaphragm is investigated using lens-less time averaged in-line digital holography. The analysis and capability of the numerically reconstructed amplitude and phase information from in-line time averaged holograms as applied to MEMS vibration are pres...