Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography

• Main Authors: Miao, Jianmin, Singh, Vijay Raj, Wang, Zhihong, Hegde, Gopalkrishna M., Anand, Asundi
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2011
• 主題: DRNTU::Science::Physics::Optics and light
• 在線閱讀: https://hdl.handle.net/10356/94157; http://hdl.handle.net/10220/7003

In this paper dynamic characterization of a MEMS diaphragm is investigated using lens-less time averaged in-line digital holography. The analysis and capability of the numerically reconstructed amplitude and phase information from in-line time averaged holograms as applied to MEMS vibration are pres...