Fabrication and experimental characterization of nanochannels

• Main Authors: Phan, Vinh-Nguyen, Nguyen, Nam-Trung, Yang, Chun
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/94172; http://hdl.handle.net/10220/7705
• Institution: Nanyang Technological University

Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the...