Fabrication and experimental characterization of nanochannels

• Main Authors: Phan, Vinh-Nguyen, Nguyen, Nam-Trung, Yang, Chun
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2012
• 主題: DRNTU::Engineering::Mechanical engineering
• 在線閱讀: https://hdl.handle.net/10356/94172; http://hdl.handle.net/10220/7705
• 機構: Nanyang Technological University

Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the...