Fabrication and experimental characterization of nanochannels

Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the...

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Main Authors: Phan, Vinh-Nguyen, Nguyen, Nam-Trung, Yang, Chun
Other Authors: School of Mechanical and Aerospace Engineering
Format: Conference or Workshop Item
Language:English
Published: 2012
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Online Access:https://hdl.handle.net/10356/94172
http://hdl.handle.net/10220/7705
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-941722020-03-07T13:26:33Z Fabrication and experimental characterization of nanochannels Phan, Vinh-Nguyen Nguyen, Nam-Trung Yang, Chun School of Mechanical and Aerospace Engineering International Conference on Micro/Nanoscale Heat and Mass Transfer (2nd : 2009 : Shanghai, China) DRNTU::Engineering::Mechanical engineering Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by etch rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep reactive ion etching (DRIE). Both nanonochannel and microchannel were sealed by a Pyrex glass wafer using anodic bonding. The fabricated nanochannels were characterized by capillary filling and evaporation experiments. Due to the small channel height and weak fluorescent signal, fluorescent techniques are not suitable for the characterization of the nanochannels. A long exposure time due to the limited amount of fluorescent molecules inhibit the measurement of transient and dynamic processes. However, as the channel height shorter than all visible wavelengths, the contrast in refractive indices of air and liquid allow clear visualization of nanochannels filled with liquids. Automatic image processing with MATLAB allows the evaluation of capillary filling in nanochannels. Interesting phenomena and discrepancies with conventional theories are presented. 2012-04-10T07:49:35Z 2019-12-06T18:51:58Z 2012-04-10T07:49:35Z 2019-12-06T18:51:58Z 2009 2009 Conference Paper Phan, V. N., Nguyen, N. T. & Yang, C. (2009). Fabrication and Experimental Characterization of Nanochannels. ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, 2, pp.411-414. https://hdl.handle.net/10356/94172 http://hdl.handle.net/10220/7705 10.1115/MNHMT2009-18158 159378 en © 2009 ASME.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering
spellingShingle DRNTU::Engineering::Mechanical engineering
Phan, Vinh-Nguyen
Nguyen, Nam-Trung
Yang, Chun
Fabrication and experimental characterization of nanochannels
description Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by etch rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep reactive ion etching (DRIE). Both nanonochannel and microchannel were sealed by a Pyrex glass wafer using anodic bonding. The fabricated nanochannels were characterized by capillary filling and evaporation experiments. Due to the small channel height and weak fluorescent signal, fluorescent techniques are not suitable for the characterization of the nanochannels. A long exposure time due to the limited amount of fluorescent molecules inhibit the measurement of transient and dynamic processes. However, as the channel height shorter than all visible wavelengths, the contrast in refractive indices of air and liquid allow clear visualization of nanochannels filled with liquids. Automatic image processing with MATLAB allows the evaluation of capillary filling in nanochannels. Interesting phenomena and discrepancies with conventional theories are presented.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Phan, Vinh-Nguyen
Nguyen, Nam-Trung
Yang, Chun
format Conference or Workshop Item
author Phan, Vinh-Nguyen
Nguyen, Nam-Trung
Yang, Chun
author_sort Phan, Vinh-Nguyen
title Fabrication and experimental characterization of nanochannels
title_short Fabrication and experimental characterization of nanochannels
title_full Fabrication and experimental characterization of nanochannels
title_fullStr Fabrication and experimental characterization of nanochannels
title_full_unstemmed Fabrication and experimental characterization of nanochannels
title_sort fabrication and experimental characterization of nanochannels
publishDate 2012
url https://hdl.handle.net/10356/94172
http://hdl.handle.net/10220/7705
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