Fabrication and experimental characterization of nanochannels
Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the...
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Main Authors: | Phan, Vinh-Nguyen, Nguyen, Nam-Trung, Yang, Chun |
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Other Authors: | School of Mechanical and Aerospace Engineering |
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2012
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/94172 http://hdl.handle.net/10220/7705 |
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Institution: | Nanyang Technological University |
Language: | English |
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