Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a...
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Main Authors: | , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2013
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Online Access: | https://hdl.handle.net/10356/94794 http://hdl.handle.net/10220/9158 |
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Institution: | Nanyang Technological University |
Language: | English |