Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite

Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a...

Full description

Saved in:
Bibliographic Details
Main Authors: Lau, Gih Keong, Yang, Jiaping, Thubthimthong, Borriboon, Chong, Nyok-Boon, Tan, Cheng Peng, He, Zhimin
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/94794
http://hdl.handle.net/10220/9158
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English