Precisely rectilinear electro-thermal microactuator using a high-aspect ratio microstructured Si/SU-8 composite

• Main Authors: Thubthimthong, Borriboon, Lau, Gih Keong, Boon, Chong Nyok, Matham, Murukeshan Vadakke
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/96253; http://hdl.handle.net/10220/11488
• Institution: Nanyang Technological University

This paper presents a Si/SU-8 composite electro-thermal microactuator that can generate a precisely rectilinear in-plane stroke. The microactuator consists of a pair of electro-thermally activated composite bimorphs which are joined at their tips through a central Si beam. When activated, the centra...