Precisely rectilinear electro-thermal microactuator using a high-aspect ratio microstructured Si/SU-8 composite
This paper presents a Si/SU-8 composite electro-thermal microactuator that can generate a precisely rectilinear in-plane stroke. The microactuator consists of a pair of electro-thermally activated composite bimorphs which are joined at their tips through a central Si beam. When activated, the centra...
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/96253 http://hdl.handle.net/10220/11488 |
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| Institution: | Nanyang Technological University |
| Language: | English |