Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
A novel fabrication technology for high aspect-ratio polysilicon (HARP) microstructures was developed for the fabrication of inertial sensors such as accelerometer or gyroscope.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4152 |
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| Institution: | Nanyang Technological University |