Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications

A novel fabrication technology for high aspect-ratio polysilicon (HARP) microstructures was developed for the fabrication of inertial sensors such as accelerometer or gyroscope.

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Bibliographic Details
Main Author:	Chong, Gang Yih.
Other Authors:	Tse, Man Siu
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:	http://hdl.handle.net/10356/4152
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4152
record_format	dspace
spelling	sg-ntu-dr.10356-41522023-07-04T15:53:45Z Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications Chong, Gang Yih. Tse, Man Siu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics A novel fabrication technology for high aspect-ratio polysilicon (HARP) microstructures was developed for the fabrication of inertial sensors such as accelerometer or gyroscope. Master of Engineering 2008-09-17T09:45:36Z 2008-09-17T09:45:36Z 2002 2002 Thesis http://hdl.handle.net/10356/4152 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Chong, Gang Yih. Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
description	A novel fabrication technology for high aspect-ratio polysilicon (HARP) microstructures was developed for the fabrication of inertial sensors such as accelerometer or gyroscope.
author2	Tse, Man Siu
author_facet	Tse, Man Siu Chong, Gang Yih.
format	Theses and Dissertations
author	Chong, Gang Yih.
author_sort	Chong, Gang Yih.
title	Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
title_short	Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
title_full	Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
title_fullStr	Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
title_full_unstemmed	Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
title_sort	fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
publishDate	2008
url	http://hdl.handle.net/10356/4152
_version_	1772828162010382336

Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications

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