Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
A novel fabrication technology for high aspect-ratio polysilicon (HARP) microstructures was developed for the fabrication of inertial sensors such as accelerometer or gyroscope.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/4152 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
Be the first to leave a comment!