Phase-change materials in optically triggered microactuators

• Main Authors: Kalb, J.A., Guo, Q., Zhang, X., Li, Y., Sow, C., Thompson, C.V.
• Other Authors: MATERIALS SCIENCE AND ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Actuators; Laser annealing; Stress measurement; Tellurium alloys
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/64972
• Institution: National University of Singapore

10.1109/JMEMS.2008.928708