Phase-change materials in optically triggered microactuators
10.1109/JMEMS.2008.928708
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2014
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sg-nus-scholar.10635-649722024-11-12T19:22:36Z Phase-change materials in optically triggered microactuators Kalb, J.A. Guo, Q. Zhang, X. Li, Y. Sow, C. Thompson, C.V. SINGAPORE-MIT ALLIANCE PHYSICS MATERIALS SCIENCE AND ENGINEERING Actuators Laser annealing Stress measurement Tellurium alloys 10.1109/JMEMS.2008.928708 Journal of Microelectromechanical Systems 17 5 1094-1103 JMIYE 2014-06-17T07:59:38Z 2014-06-17T07:59:38Z 2008 Article Kalb, J.A., Guo, Q., Zhang, X., Li, Y., Sow, C., Thompson, C.V. (2008). Phase-change materials in optically triggered microactuators. Journal of Microelectromechanical Systems 17 (5) : 1094-1103. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2008.928708 10577157 http://scholarbank.nus.edu.sg/handle/10635/64972 000260464800004 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Actuators Laser annealing Stress measurement Tellurium alloys |
| spellingShingle |
Actuators Laser annealing Stress measurement Tellurium alloys Kalb, J.A. Guo, Q. Zhang, X. Li, Y. Sow, C. Thompson, C.V. Phase-change materials in optically triggered microactuators |
| description |
10.1109/JMEMS.2008.928708 |
| author2 |
SINGAPORE-MIT ALLIANCE |
| author_facet |
SINGAPORE-MIT ALLIANCE Kalb, J.A. Guo, Q. Zhang, X. Li, Y. Sow, C. Thompson, C.V. |
| format |
Article |
| author |
Kalb, J.A. Guo, Q. Zhang, X. Li, Y. Sow, C. Thompson, C.V. |
| author_sort |
Kalb, J.A. |
| title |
Phase-change materials in optically triggered microactuators |
| title_short |
Phase-change materials in optically triggered microactuators |
| title_full |
Phase-change materials in optically triggered microactuators |
| title_fullStr |
Phase-change materials in optically triggered microactuators |
| title_full_unstemmed |
Phase-change materials in optically triggered microactuators |
| title_sort |
phase-change materials in optically triggered microactuators |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/64972 |
| _version_ |
1821192103607140352 |