Mechanism of stress memorization technique (SMT) and method to maximize its effect

Mechanism of stress memorization technique (SMT) and method to maximize its effect

10.1109/LED.2011.2108634

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Bibliographic Details
Main Authors: Pandey, S.M., Liu, J., Hooi, Z.S., Flachowsky, S., Herrmann, T., Tao, W., Benistant, F., See, A., Chu, S., Samudra, G.S.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Laser annealing (LSA)
stress
stress memorization technique (SMT)
TCAD
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82675
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/82675

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