Mechanism of stress memorization technique (SMT) and method to maximize its effect
10.1109/LED.2011.2108634
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2014
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sg-nus-scholar.10635-826752023-10-26T21:23:41Z Mechanism of stress memorization technique (SMT) and method to maximize its effect Pandey, S.M. Liu, J. Hooi, Z.S. Flachowsky, S. Herrmann, T. Tao, W. Benistant, F. See, A. Chu, S. Samudra, G.S. ELECTRICAL & COMPUTER ENGINEERING Laser annealing (LSA) stress stress memorization technique (SMT) TCAD 10.1109/LED.2011.2108634 IEEE Electron Device Letters 32 4 467-469 EDLED 2014-10-07T04:32:10Z 2014-10-07T04:32:10Z 2011-04 Article Pandey, S.M., Liu, J., Hooi, Z.S., Flachowsky, S., Herrmann, T., Tao, W., Benistant, F., See, A., Chu, S., Samudra, G.S. (2011-04). Mechanism of stress memorization technique (SMT) and method to maximize its effect. IEEE Electron Device Letters 32 (4) : 467-469. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2011.2108634 07413106 http://scholarbank.nus.edu.sg/handle/10635/82675 000288664800013 Scopus |
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Asia |
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Singapore Singapore |
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Laser annealing (LSA) stress stress memorization technique (SMT) TCAD |
| spellingShingle |
Laser annealing (LSA) stress stress memorization technique (SMT) TCAD Pandey, S.M. Liu, J. Hooi, Z.S. Flachowsky, S. Herrmann, T. Tao, W. Benistant, F. See, A. Chu, S. Samudra, G.S. Mechanism of stress memorization technique (SMT) and method to maximize its effect |
| description |
10.1109/LED.2011.2108634 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Pandey, S.M. Liu, J. Hooi, Z.S. Flachowsky, S. Herrmann, T. Tao, W. Benistant, F. See, A. Chu, S. Samudra, G.S. |
| format |
Article |
| author |
Pandey, S.M. Liu, J. Hooi, Z.S. Flachowsky, S. Herrmann, T. Tao, W. Benistant, F. See, A. Chu, S. Samudra, G.S. |
| author_sort |
Pandey, S.M. |
| title |
Mechanism of stress memorization technique (SMT) and method to maximize its effect |
| title_short |
Mechanism of stress memorization technique (SMT) and method to maximize its effect |
| title_full |
Mechanism of stress memorization technique (SMT) and method to maximize its effect |
| title_fullStr |
Mechanism of stress memorization technique (SMT) and method to maximize its effect |
| title_full_unstemmed |
Mechanism of stress memorization technique (SMT) and method to maximize its effect |
| title_sort |
mechanism of stress memorization technique (smt) and method to maximize its effect |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82675 |
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1781784196912513024 |