Mechanism of stress memorization technique (SMT) and method to maximize its effect

10.1109/LED.2011.2108634

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Bibliographic Details
Main Authors:	Pandey, S.M., Liu, J., Hooi, Z.S., Flachowsky, S., Herrmann, T., Tao, W., Benistant, F., See, A., Chu, S., Samudra, G.S.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Laser annealing (LSA) stress stress memorization technique (SMT) TCAD
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82675
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Institution:	National University of Singapore

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Summary:	10.1109/LED.2011.2108634

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