Mechanism of stress memorization technique (SMT) and method to maximize its effect

• Main Authors: Pandey, S.M., Liu, J., Hooi, Z.S., Flachowsky, S., Herrmann, T., Tao, W., Benistant, F., See, A., Chu, S., Samudra, G.S.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Laser annealing (LSA); stress; stress memorization technique (SMT); TCAD
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82675
• Institution: National University of Singapore

10.1109/LED.2011.2108634