Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite

Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite

Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a...

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Main Authors: Lau, Gih Keong, Yang, Jiaping, Thubthimthong, Borriboon, Chong, Nyok-Boon, Tan, Cheng Peng, He, Zhimin
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/94794
http://hdl.handle.net/10220/9158
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-947942023-03-04T17:17:51Z Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite Lau, Gih Keong Yang, Jiaping Thubthimthong, Borriboon Chong, Nyok-Boon Tan, Cheng Peng He, Zhimin School of Mechanical and Aerospace Engineering Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a high-CTE polymer composite to solve the shortcoming of silicon. The polymer composite consists of high-aspect-ratio micro-machined SU-8 thermal expander and silicon thermal conductor. A micro-positioner which embodies the proposed polymer composite can drive a slider to travel fast (>1 kHz) more than a 17 nm-pitch data track under a moderate temperature rise (<100 °C). Published version 2013-02-19T06:37:12Z 2019-12-06T19:02:24Z 2013-02-19T06:37:12Z 2019-12-06T19:02:24Z 2012 2012 Journal Article Lau, G. K., Yang, J., Thubthimthong, B., Chong, N.- B., Tan, C. P., & He, Z. (2012). Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite. Applied Physics Letters, 101(3), 033108-. 0003-6951 https://hdl.handle.net/10356/94794 http://hdl.handle.net/10220/9158 10.1063/1.4737644 en Applied Physics Letters © 2012 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: [doi:http://dx.doi.org/10.1063/1.4737644]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
description Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a high-CTE polymer composite to solve the shortcoming of silicon. The polymer composite consists of high-aspect-ratio micro-machined SU-8 thermal expander and silicon thermal conductor. A micro-positioner which embodies the proposed polymer composite can drive a slider to travel fast (>1 kHz) more than a 17 nm-pitch data track under a moderate temperature rise (<100 °C).
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Lau, Gih Keong
Yang, Jiaping
Thubthimthong, Borriboon
Chong, Nyok-Boon
Tan, Cheng Peng
He, Zhimin
format Article
author Lau, Gih Keong
Yang, Jiaping
Thubthimthong, Borriboon
Chong, Nyok-Boon
Tan, Cheng Peng
He, Zhimin
spellingShingle Lau, Gih Keong
Yang, Jiaping
Thubthimthong, Borriboon
Chong, Nyok-Boon
Tan, Cheng Peng
He, Zhimin
Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
author_sort Lau, Gih Keong
title Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
title_short Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
title_full Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
title_fullStr Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
title_full_unstemmed Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
title_sort fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
publishDate 2013
url https://hdl.handle.net/10356/94794
http://hdl.handle.net/10220/9158
_version_ 1759854613252538368

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