Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite

• Main Authors: Lau, Gih Keong, Yang, Jiaping, Thubthimthong, Borriboon, Chong, Nyok-Boon, Tan, Cheng Peng, He, Zhimin
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2013
• 在線閱讀: https://hdl.handle.net/10356/94794; http://hdl.handle.net/10220/9158
• 機構: Nanyang Technological University

Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a...