Crystallization and surface texturing of amorphous-Si induced by UV laser for photovoltaic application

The DPSS Nd:YVO4 UV laser is used to anneal amorphous silicon (a-Si) film to achieve crystallization and nano-dome surface texturing simultaneously in a one-step annealing process. With pulse energy of 380 mJ/cm2 and repetition rate of 20 kHz, the a-Si can be crystallized by the sequential lateral s...

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Bibliographic Details
Main Authors: Hong, Lei, Wang, Xincai, Rusli, Wang, Hao, Zheng, Hongyu, Yu, Hongyu
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/95246
http://hdl.handle.net/10220/9132
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Institution: Nanyang Technological University
Language: English