A practical guide for the fabrication of microfluidic devices using glass and silicon

A practical guide for the fabrication of microfluidic devices using glass and silicon

This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key proc...

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Main Authors: Iliescu, Ciprian, Taylor, Hayden, Avram, Marioara, Miao, Jianmin, Franssila, Sami
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Materials::Mechanical strength of materials
Online Access:https://hdl.handle.net/10356/95637
http://hdl.handle.net/10220/8955
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-956372023-03-04T17:18:35Z A practical guide for the fabrication of microfluidic devices using glass and silicon Iliescu, Ciprian Taylor, Hayden Avram, Marioara Miao, Jianmin Franssila, Sami School of Mechanical and Aerospace Engineering DRNTU::Engineering::Materials::Mechanical strength of materials This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. Published version 2013-01-17T08:18:04Z 2019-12-06T19:18:40Z 2013-01-17T08:18:04Z 2019-12-06T19:18:40Z 2012 2012 Journal Article Iliescu, C., Taylor, H., Avram, M., Miao, J., & Franssila, S. (2012). A practical guide for the fabrication of microfluidic devices using glass and silicon. Biomicrofluidics, 6(1). 1932-1058 https://hdl.handle.net/10356/95637 http://hdl.handle.net/10220/8955 10.1063/1.3689939 22662101 en Biomicrofluidics © 2012 American Institute of Physics. This paper was published in Biomicrofluidics and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: [http://dx.doi.org/10.1063/1.3689939]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Materials::Mechanical strength of materials
spellingShingle DRNTU::Engineering::Materials::Mechanical strength of materials
Iliescu, Ciprian
Taylor, Hayden
Avram, Marioara
Miao, Jianmin
Franssila, Sami
A practical guide for the fabrication of microfluidic devices using glass and silicon
description This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Iliescu, Ciprian
Taylor, Hayden
Avram, Marioara
Miao, Jianmin
Franssila, Sami
format Article
author Iliescu, Ciprian
Taylor, Hayden
Avram, Marioara
Miao, Jianmin
Franssila, Sami
author_sort Iliescu, Ciprian
title A practical guide for the fabrication of microfluidic devices using glass and silicon
title_short A practical guide for the fabrication of microfluidic devices using glass and silicon
title_full A practical guide for the fabrication of microfluidic devices using glass and silicon
title_fullStr A practical guide for the fabrication of microfluidic devices using glass and silicon
title_full_unstemmed A practical guide for the fabrication of microfluidic devices using glass and silicon
title_sort practical guide for the fabrication of microfluidic devices using glass and silicon
publishDate 2013
url https://hdl.handle.net/10356/95637
http://hdl.handle.net/10220/8955
_version_ 1759855043926818816

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