A practical guide for the fabrication of microfluidic devices using glass and silicon

• Main Authors: Iliescu, Ciprian, Taylor, Hayden, Avram, Marioara, Miao, Jianmin, Franssila, Sami
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Materials::Mechanical strength of materials
• Online Access: https://hdl.handle.net/10356/95637; http://hdl.handle.net/10220/8955
• Institution: Nanyang Technological University

This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key proc...