Phase shift reflectometry for sub-surface defect detection

• Main Authors: Asundi, Anand Krishna, Lei, Huang, Teoh, Eden Kang Min, Sreemathy, Parthasarathy, May, Watt Sook
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: https://hdl.handle.net/10356/96013; http://hdl.handle.net/10220/10061
• Institution: Nanyang Technological University

Phase Shift Reflectometry has recently been seen as a novel alternative to interferometry since it can provide warpage measurement over large areas with no need for large optical components. To confirm its capability and to explore the use of this method for sub-surface defect detection, a Chinese m...