Influence of bias voltage on the hardness and toughness of CrAlN coatings via magnetron sputtering
Chromium aluminum nitride (CrAlN) coatings were prepared via magnetron sputtering in a mixed Ar and N2 ambient. The effect of negative bias voltage (Vb) on the microstructure was investigated using a spectrum of characterizing techniques in terms of Glancing Angle X-ray Diffractometry, Field Emissio...
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/96581 http://hdl.handle.net/10220/10302 |
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| Institution: | Nanyang Technological University |
| Language: | English |