Influence of bias voltage on the hardness and toughness of CrAlN coatings via magnetron sputtering

• Main Authors: Lee, Jyh-Wei, Lew, Wen Siang, Li, Bo, Zhang, Sam, Wang, Yu Xi
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/96581; http://hdl.handle.net/10220/10302
• Institution: Nanyang Technological University

Chromium aluminum nitride (CrAlN) coatings were prepared via magnetron sputtering in a mixed Ar and N2 ambient. The effect of negative bias voltage (Vb) on the microstructure was investigated using a spectrum of characterizing techniques in terms of Glancing Angle X-ray Diffractometry, Field Emissio...