Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry
A method for analyzing sub-micron devices by Rutherford backscattering spectrometry is presented. Using simplifying assumptions, we are able to simulate the backscattering spectrum of laterally non-uniform samples. The method has been verified with Ni/Pt laterally non-uniform layers on (1 0 0)Si sub...
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Main Authors: | , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/97163 http://hdl.handle.net/10220/10518 |
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Institution: | Nanyang Technological University |
Language: | English |