Ni(Pt) alloy silicidation on (100) Si and poly-silicon lines

• Main Authors: Pey, Kin Leong, Lee, Pooi See, Mangelinck, D.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Materials::Metallic materials::Alloys
• Online Access: https://hdl.handle.net/10356/97213; http://hdl.handle.net/10220/10478
• Institution: Nanyang Technological University

The roles of the Pt in Ni-(5 at.% Pt) alloy reaction on narrow c-Si (100) and polysilicon (poly-Si) lines by rapid thermal annealed (RTP) in the range of 400 to 900 °C were studied. By the addition of Pt as an alloying element, the phase stability of NiSi on Si(100) was enhanced and the retardation...