Ni(Pt) alloy silicidation on (100) Si and poly-silicon lines

• Main Authors: Pey, Kin Leong, Lee, Pooi See, Mangelinck, D.
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2013
• 主題: DRNTU::Engineering::Materials::Metallic materials::Alloys
• 在線閱讀: https://hdl.handle.net/10356/97213; http://hdl.handle.net/10220/10478

The roles of the Pt in Ni-(5 at.% Pt) alloy reaction on narrow c-Si (100) and polysilicon (poly-Si) lines by rapid thermal annealed (RTP) in the range of 400 to 900 °C were studied. By the addition of Pt as an alloying element, the phase stability of NiSi on Si(100) was enhanced and the retardation...