Micro-RBS study of nickel silicide formation
Two MeV He+ microbeam-Rutherford backscattering (μ-RBS) is used to obtain information on silicide formation in patterned nickel silicide samples under different annealing conditions. It is important to characterize silicide formation processes in such laterally non-homogenous samples in order to und...
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| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/97223 http://hdl.handle.net/10220/10531 |
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| Institution: | Nanyang Technological University |
| Language: | English |