Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides

• Main Authors: Mangelinck, D., Osipowicz, T., See, A., Lee, Pooi See, Pey, Kin Leong, Shen, Zexiang, Ding, Jun
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Materials
• Online Access: https://hdl.handle.net/10356/94700; http://hdl.handle.net/10220/8060
• Institution: Nanyang Technological University

The formation of Ni silicides has been successfully monitored by Raman spectroscopy. Ni silicides formed at different annealing temperatures using rapid thermal annealing were analyzed using Rutherford backscattering spectroscopy and X-ray diffraction. Raman spectroscopy was further us...