Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas
An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-la...
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sg-ntu-dr.10356-976812020-09-26T21:54:58Z Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas Huang, S. Y. Cheng, Q. J. Xu, S. Wei, D. Y. Zhou, H. P. Long, J. D. Levchenko, I. Ostrikov, K. Institute of Advanced Studies DRNTU::Science::Physics An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-law behavior. It is also shown that the synthesized ZnO nanodots are highly-uniform, controllable by the experimental parameters, and also feature good structural and photoluminescent properties. These results suggest that this custom-designed ICP-based technique is very effective and highly-promising for the synthesis of property- and size-controllable highly-uniform ZnO nanodots suitable for next-generation light emitting diodes, energy storage, UV nanolasers, and other applications. Published version 2013-07-23T03:08:55Z 2019-12-06T19:45:24Z 2013-07-23T03:08:55Z 2019-12-06T19:45:24Z 2012 2012 Journal Article Huang, S. Y., Cheng, Q. J., Xu, S., Wei, D. Y., Zhou, H. P., Long, J. D., et al. (2012). Self-organized ZnO nanodot arrays: Effective control using SiNx interlayers and low-temperature plasmas. Journal of Applied Physics, 111(3), 036101. 0021-8979 https://hdl.handle.net/10356/97681 http://hdl.handle.net/10220/12028 10.1063/1.3673593 en Journal of applied physics © 2012 American Institute of Physics. This paper was published in Journal of Applied Physics and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: http://dx.doi.org/10.1063/1.3673593. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. application/pdf |
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DRNTU::Science::Physics Huang, S. Y. Cheng, Q. J. Xu, S. Wei, D. Y. Zhou, H. P. Long, J. D. Levchenko, I. Ostrikov, K. Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas |
| description |
An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-law behavior. It is also shown that the synthesized ZnO nanodots are highly-uniform, controllable by the experimental parameters, and also feature good structural and photoluminescent properties. These results suggest that this custom-designed ICP-based technique is very effective and highly-promising for the synthesis of property- and size-controllable highly-uniform ZnO nanodots suitable for next-generation light emitting diodes, energy storage, UV nanolasers, and other applications. |
| author2 |
Institute of Advanced Studies |
| author_facet |
Institute of Advanced Studies Huang, S. Y. Cheng, Q. J. Xu, S. Wei, D. Y. Zhou, H. P. Long, J. D. Levchenko, I. Ostrikov, K. |
| format |
Article |
| author |
Huang, S. Y. Cheng, Q. J. Xu, S. Wei, D. Y. Zhou, H. P. Long, J. D. Levchenko, I. Ostrikov, K. |
| author_sort |
Huang, S. Y. |
| title |
Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas |
| title_short |
Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas |
| title_full |
Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas |
| title_fullStr |
Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas |
| title_full_unstemmed |
Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas |
| title_sort |
self-organized zno nanodot arrays : effective control using sinx interlayers and low-temperature plasmas |
| publishDate |
2013 |
| url |
https://hdl.handle.net/10356/97681 http://hdl.handle.net/10220/12028 |
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1681056502028173312 |