Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas

• Main Authors: Huang, S. Y., Cheng, Q. J., Xu, S., Wei, D. Y., Zhou, H. P., Long, J. D., Levchenko, I., Ostrikov, K.
• Other Authors: Institute of Advanced Studies
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Science::Physics
• Online Access: https://hdl.handle.net/10356/97681; http://hdl.handle.net/10220/12028
• Institution: Nanyang Technological University

An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-la...