Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas

• المؤلفون الرئيسيون: Huang, S. Y., Cheng, Q. J., Xu, S., Wei, D. Y., Zhou, H. P., Long, J. D., Levchenko, I., Ostrikov, K.
• مؤلفون آخرون: Institute of Advanced Studies
• التنسيق: مقال
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Science::Physics
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/97681; http://hdl.handle.net/10220/12028

An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-la...